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Refractive Index Fitting

The refractive index of the material(substrate, coating material) is the most important data for the thin film calculation(Development, inversion fitting).

  • Fitting the refractive index of the material by the photometric method need one or more of the transmittance, the reflectance and the film thickness. When the accuracy of the test data is the same, the fitting result is more reliable with more data type.
  • We can fit the refractive index of a substrate or a kind of coating material. In general, we need know the refractive index of the substrate(can be fitted in advance) before we can fit the refractive index of coating material.
  • Multi-angle photometric data may be helpful for the convergence of the refractive index fitting procedure.
基板材料
  • 超白玻璃;
  • 吸收有色玻璃;
  • 其它类型的基板材料如晶体、硅片;
无须椭偏仪,有无模型和相应系数均可拟合;
镀膜材料:介质
  • 弱吸收镀膜材料Nb2O5,Ta2O5,TiO2,SiO2 等;
  • 吸收材料:CrOx等;
方便操作,Office兼容操作,支持多种数据来源
镀膜材料:金属、导体、半导体
  • Si3N4,ITO,ZnSnOx等;
  • Cu,Ag,NiCr等;
  • 其它材料
拟合结果准确可验证