Coating Line Running Control

Uniformity Adjustment and Control

Uniformity refers to the difference between the different positions of the glass.

The problems that may arise from uniformity include overall optical properties (color, emissivity), physical properties (abrasion resistance, temperature shock), chemical properties (acid and alkali resistance), etc.

The reason is one or more Layers of thin film design are different(thickness or composition) from one position to others.

There are many factors that affect the uniformity, including the structure of the equipment itself, magnets, gas distribution pipes, shielding, target substrate distance, etc., but also the auxiliary gas settings.

The uniformity is adjusted by modeling factors both in terms of positions and in real time.

The uniformity is controlled by monitoring the spectrum/resistance of each piece of glass real time during the production process and adjusting it in case deviation from normal level.