Introduction

Process Master is a tool for simulating and controlling coating processes. It records and adjusts process parameters and performs inversion, monitoring, and adjustment of across-glass uniformity.

Uniformity refers to performance differences across different positions on a glass pane, which can affect optical properties (color, emissivity), physical properties (scratch resistance, thermal shock), and chemical resistance. These differences usually arise from variations in one or more coating layers (e.g., thickness or material composition) at different positions.

Factors affecting uniformity include equipment structure, magnets, gas distribution piping, baffles, target-to-substrate distance, and auxiliary-gas settings.

We model possible contributors to non-uniformity and provide both offline (batch) and online (real-time) adjustment methods. During production we also read each glass' measured spectrum for real-time uniformity monitoring.